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Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor
- May 11, 2011 Knowles Microphones Infringe Analog Patent: ITC
- January 05, 2010 ITC To Begin 337 Probe Of Knowles Micromachines
- December 18, 2009 ITC Launches 337 Probe Into Analog's Microphones
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