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Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide
- March 14, 2018 Harvard, Micron Settle Patent Row After TC Heartland Ruling
- November 30, 2017 Harvard, Micron Tech IP Suit Moved In Light Of TC Heartland
- November 28, 2017 Harvard Says Micron Forfeited Venue Args In Tech IP Case
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